NDLI: UV nonvolatile sensor by using SONOS capacitor device

Content Provider	IEEE Xplore Digital Library
Author	Wen-Ching Hsieh Lee, H.-T.D. Fuh-Cheng Jong Shich-Chuan Wu Heh, D.
Copyright Year	2013
Description	Author affiliation: ETOMS Electron. Corp, Taiwan (Lee, H.-T.D.) \|\| Dept. of Opto-Electron. Syst. Eng., Minghsin Univ. of Sci. & Technol., Hsin-Chu, Taiwan (Wen-Ching Hsieh) \|\| Nat. Nano Device Labs., Tainan, Taiwan (Shich-Chuan Wu; Heh, D.) \|\| Southern Taiwan Univ. of Technol., Tainan, Taiwan (Fuh-Cheng Jong)
Abstract	The silicon-oxide-nitride-oxide-silicon (SONOS) capacitor devices can be candidates for nonvolatile ultraviolet UV radiation sensors. In the case of SONOS type UV radiation sensors, the UV radiation induces a significant increase of threshold voltage for SONOS by UV-assisted-low-gate-voltage program. The change of threshold voltage for SONOS after UV ray expose has a correlation to the dose of UV ray exposure. In this paper, the performance of capacitor types of SONOS used for UV sensor was studied. The data of SONOS UV radiation sensors wrote by UV-assisted-low-gate-voltage program was nonvolatile at least for 1 month. The SONOS capacitor device with ONO gate dielectric in this study has demonstrated the feasibility for UV nonvolatile sensor application.
Starting Page	163
Ending Page	164
File Size	221143
Page Count	2
File Format	PDF
e-ISBN	9781479904655
DOI	10.1109/ICAIT.2013.6621548
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-07-06
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	SONOS devices SONOS Electron traps Ultraviolet radiation Capacitors Logic gates Threshold voltage Capacitor Photonics Sensor
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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