NDLI: Methane Detection by MIM Sensor Devices Based on Nano ZnO Thin Films Obtained by Sol-Gel and by Anodization: A Comparative Study

Content Provider	IEEE Xplore Digital Library
Author	Bhattacharyya, P. Basu, P.K. Basu, S.
Copyright Year	2010
Abstract	Amongst various gas sensor structures developed so far probably the least investigated one is the Metal- (Active) Insulator-Metal or (MIM) structure. It has been reported that the vertical electron transport mechanism of this structure offers high response with fast response and recovery for gases like H2 and methane compared to the conventional planar configuration. In this paper we report on the comparative performances of two kinds of MIM sensors based on nanocrystalline-nanoporous ZnO as the active sensing layer derived by sol-gel and by the UV assisted electrochemical anodization method respectively. The sensor structures based on Pd-Ag (26%)/ZnO/Zn were investigated in presence of five methane concentrations (0.01, 0.05, 0.1, 0.5 and 1.0%) and in the temperature range 150°C to 300°C. The electrochemically developed ZnO showed superior performance in terms of operating temperature, response magnitude, response time and recovery time. Moreover, it showed response to much lower concentrations (like 0.01% and 0.05 %) of methane that could not be detected by the sol-gel derived sensor. The possible reason for the superiority of the electrochemically grown ZnO compared to the sol-gel derived one was shown to be the significantly lower grain size and appreciably high porosity. But, in spite of its promising performance the electrochemically developed MIM sensor has no selection of the substrate and so it is not compatible to the standard IC technology. It leads to its restricted use to develop only the stand-alone sensor devices. On the other hand, sol-gel derived MIM device is based on the Si substrate. So, it is IC compatible and is suitable for the integrated sensor platform.
Starting Page	110
Ending Page	115
File Size	392530
Page Count	6
File Format	PDF
ISBN	9781424474745
e-ISBN	9781424474738
DOI	10.1109/SENSORDEVICES.2010.27
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-07-18
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature sensors Grain size MIM Actuators Methane sensor Pd-Ag Catalytic contact Zinc oxide Zinc Oxide Nanoporous Nanocrystalline
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Methane Detection by Nano ZnO Based MIM Sensor Devices

Palladium Surface Modification of Nanocrystalline Sol-Gel Derived Zinc Oxide Thin Films and its Effect on Methane Sensing

The Effect of Catalytic Metal Contact on Methane Sensing Performance of Nanoporous ZnO-Si Heterojunction

pH sensing characteristics of EGFET based on Pd-doped ZnO thin films synthesized by sol-gel method

HIGH SENSITIVITY METHANE SENSOR BY CHEMICALLY DEPOSITED NANOCRYSTALLINE ZNO THIN FILM

Detection of Hydrogen by Noble Metal Treated Nanoporous Si and ZnO Thin Films

Optical properties of ZnO thin films prepared by Sol- gel method

Fabrication of ZnO thin film based humidity sensor with fast response by sol-gel associated to spin coating method

Structural properties of Al-doped ZnO thin films deposited by Sol-Gel spin-coating method

Methane Detection by MIM Sensor Devices Based on Nano ZnO Thin Films Obtained by Sol-Gel and by Anodization: A Comparative Study

Similar Documents

Methane Detection by Nano ZnO Based MIM Sensor Devices

Palladium Surface Modification of Nanocrystalline Sol-Gel Derived Zinc Oxide Thin Films and its Effect on Methane Sensing

The Effect of Catalytic Metal Contact on Methane Sensing Performance of Nanoporous ZnO-Si Heterojunction

pH sensing characteristics of EGFET based on Pd-doped ZnO thin films synthesized by sol-gel method

HIGH SENSITIVITY METHANE SENSOR BY CHEMICALLY DEPOSITED NANOCRYSTALLINE ZNO THIN FILM

Detection of Hydrogen by Noble Metal Treated Nanoporous Si and ZnO Thin Films

Optical properties of ZnO thin films prepared by Sol- gel method

Fabrication of ZnO thin film based humidity sensor with fast response by sol-gel associated to spin coating method

Structural properties of Al-doped ZnO thin films deposited by Sol-Gel spin-coating method

Methane Detection by MIM Sensor Devices Based on Nano ZnO Thin Films Obtained by Sol-Gel and by Anodization: A Comparative Study