NDLI: Effect of doping concentration and substrate temperature on the physical properties of Indium-doped zinc oxide thin films

Content Provider	IEEE Xplore Digital Library
Author	Biswal, R.R. Maldonado, A. de la l. Olvera, M.
Copyright Year	2012
Description	Author affiliation: Departamento de Ingeniería Eléctrica, Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional, CINVESTAV-IPN, SEES, Apartado Postal 14740, México, D.F., 07000, Mexico (Biswal, R.R.; Maldonado, A.; de la l Olvera, M.)
Abstract	Conductive and transparent Indium-doped zinc oxide (ZnO:In) thin films were deposited on glass substrates by the ultrasonic spray pyrolysis technique. Films were prepared from 0.2 M starting solutions of zinc acetate dissolved in a mixture of water, acetic acid and methanol. Indium acetate was used as In source at three different atomic concentrations, namely, 1, 2, and 3 at %. The effect of the Indium concentration in the starting solution on the electrical, structural, morphological, and optical characteristics of the films was studied. Electrical resistivity as low as $2×10^{−3}Ωcm,$ electron mobility around 12 $cm^{2}/(V-s),$ carrier concentration in the range 2.19–3.4 $×10^{20}cm^{−3},$ and an optical transmittance in the range 65–75 % were achieved for 3 at % ZnO:In thin films. All films were polycrystalline, growing preferentially along the (002) and (101) directions, depending on the indium concentration in the starting solution. Shape and grain size, were dependent on the [In/Zn] ratio in the starting solutions as well.
Starting Page	1
Ending Page	7
File Size	970136
Page Count	7
File Format	PDF
ISBN	9781467321709
e-ISBN	9781467321693
DOI	10.1109/ICEEE.2012.6421147
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-09-26
Publisher Place	Mexico
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Grain size Semiconductor oxides Films Ultrasonic Spray Pyrolysis Doping Zinc oxide Indium Thin Films Substrates
Content Type	Text
Resource Type	Article

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