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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Sherstnev, V.V. Grebenshchikova, E.A. Monakhov, A.M. Imenkov, A.N. Baranov, A.N. Yakovlev, Yu.P. |
| Copyright Year | 2009 |
| Description | Author affiliation: Ioffe Physical-Technical Institute, St. Petersburg, 194021, Russia (Sherstnev, V.V.; Grebenshchikova, E.A.; Monakhov, A.M.; Imenkov, A.N.; Yakovlev, Yu.P.) || Institut d'Electronique du Sud (IES), Universite Montpellier 2, 34095, France (Baranov, A.N.) |
| Abstract | The technology of fabrication disk cavity of whispering gallery modes (WGM) laser for middle Infrared (MIR) spectral range was developed. The post-growth geometry formation of the disk cavity was performed using selective wet chemical etchant comprised of CrO3, HF and H2O. The wet-chemical etchant for semiconductor multylayers geterostructers lattice-matched to GaSb was investigated. The application of this technology allow us to fabricate the disk cavity with a diameter of 200 µm and height 15 µm. To enlarge the optical power of emission the disk chip was cleaved up to symmetric half-disk. It was established, that the lasers assembled on the basis of such half-disk cavity are tunable and generate at the wavelength of 2.35 µm at 300 K. |
| Starting Page | 27 |
| Ending Page | 28 |
| File Size | 117194 |
| Page Count | 2 |
| File Format | |
| ISBN | 9781424438488 |
| DOI | 10.1109/TERAMIR.2009.5379644 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-11-03 |
| Publisher Place | Turkey |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Wet etching Semiconductor lasers Optical device fabrication Tunable circuits and devices Whispering gallery modes Laser modes Geometrical optics Chemical lasers Infrared spectra Chemical technology |
| Content Type | Text |
| Resource Type | Article |
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