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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Qijun Chen Allen, S.D. |
| Copyright Year | 1996 |
| Description | Author affiliation: Tulane Univ., New Orleans, LA, USA (Qijun Chen; Allen, S.D.) |
| Abstract | Summary form only given. Liquid encapsulated Laser Chemical Vapor Deposition (LLCVD) of metal and insulator patterns has previously been demonstrated for neat liquids and volatile molecular precursors in solution. In LLCVD, the focused laser beam locally heats the substrate immersed in a liquid containing the precursor. In this paper we present an investigation of direct write laser deposition of Cu and Ag conductor lines from solutions of the corresponding salts in various solvents. |
| Starting Page | 425 |
| Ending Page | 426 |
| File Size | 310368 |
| Page Count | 2 |
| File Format | |
| ISBN | 1557524432 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1996-06-02 |
| Access Restriction | Subscribed |
| Subject Keyword | Silver Insulation Solvents Conductors Metal-insulator structures Chemical lasers Copper Dielectric liquids Laser beams Chemical vapor deposition |
| Content Type | Text |
| Resource Type | Article |
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