NDLI: Electrical properties and Raman characterization of a-C thin films deposited by thermal CVD

Content Provider	IEEE Xplore Digital Library
Author	Mohamad, F. Suriani, A.B. Noor, U.M. Rusop, M.
Copyright Year	2010
Description	Author affiliation: Solar Cell Laboratory, Faculty of Electrical Engineering; Universiti Teknologi MARA (UiTM), Shah Alam, Selangor, Malaysia (Mohamad, F.; Noor, U.M.; Rusop, M.) \|\| NANO-SciTech Center, Institute of Science; Universiti Teknologi MARA (UiTM), Shah Alam, Selangor, Malaysia (Suriani, A.B.)
Abstract	Amorphous carbon (a-C) thin films deposited with thermal CVD, have been characterized by a standard two-probe method using Advantest R6243 DC Voltage Current Source/Monitor and SemiPro Curve Software and Raman scattering experiment at an excitation wavelength of 514.5 nm provided by HORIBA Jobin Yvon (HR800) Raman. The films were prepared at various deposition temperatures ranging from 650–900°C. The conductivity of a-C thin films increased proportionally with the deposition temperature and the film deposited at 750°C shows large photoconductivity. ID/IG ratio of Raman spectra increased relatively with the deposition temperature as an indication of the disorderliness of a-C thin films. This is supported by the optical properties measurement whereby the optical band gap decreased from 0.65 to ∼0.0eV due to the increase of $sp^{2}$ bonded carbon configuration.
Starting Page	388
Ending Page	391
File Size	270784
Page Count	4
File Format	PDF
ISBN	9781424466290
e-ISBN	9781424466320
DOI	10.1109/ICEDSA.2010.5503034
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-04-11
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature distribution Amorphous carbon Electrical properties Conductivity Amorphous materials Sputtering Raman scattering Voltage Software standards Raman Optical films Optical scattering Photoconductivity Thermal CVD Monitoring
Content Type	Text
Resource Type	Article

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