NDLI: Design and fabrication of diffractive optical element applied to vertical-cavity surface emitting laser.doc

Content Provider	IEEE Xplore Digital Library
Author	Sheng-Hsiung Chang Tsair-Chun Liang Cheng-Feng Yue Bo-Hong Ke
Copyright Year	2010
Description	Author affiliation: Department of Optoelectronic Engineering, Far East University, Tainan, Taiwan (Sheng-Hsiung Chang; Cheng-Feng Yue) \|\| Department of Electrical Engineering, Far East University, Tainan, Taiwan (Bo-Hong Ke) \|\| Graduate Institute of Electro-Optical Engineering, National Kaohsiung First University of Science and Technology, Kaohsiung, Taiwan (Tsair-Chun Liang)
Abstract	In this paper, a new application strategy of diffractive optical elements (DOEs) has been proposed. The research combined vertical-cavity surface emitting laser (VCSEL) with diffractive optical elements into a single opto-electric semiconductor device. In order to fabricate DOE-VCSEL, DOE surface profile can be integrated upon P-DBR layer of VCSEL structure by using semiconductor processing. We used scalar diffractive theory, Dammann grating and Fresnel lens concept to design DOE surface profile. From simulation, we determined the element size of 488 × 488 µm2. Experimental result shows the divergence angle of 8 degrees of DOE-VCSEL can be reduced. So, the design and fabrication of diffractive optical elements structure on VCSEL can achieve the effect of output beam concentration. Compared with a conventional fiber coupling system that uses a plano-convex lens, our design has the advantages of simplicity for fiber coupling systems.
Starting Page	499
Ending Page	502
File Size	288971
Page Count	4
File Format	PDF
ISBN	9781424455652
e-ISBN	9781424455683
DOI	10.1109/3CA.2010.5533385
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-05-05
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	US Department of Energy Optical diffraction DOE-VCSEL Laser theory Optical design Stimulated emission Semiconductor lasers Optical device fabrication Surface emitting lasers VCSEL DOE Vertical cavity surface emitting lasers Lenses
Content Type	Text
Resource Type	Article

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