NDLI: Integrated control of microactuators and integrated circuits: a new turning approach in MEMS technology

Content Provider	IEEE Xplore Digital Library
Author	Lyshevski, S.E.
Copyright Year	1999
Description	Author affiliation: Dept. of Electr. Eng., Purdue Univ., Indianapolis, IN, USA (Lyshevski, S.E.)
Abstract	Advances in micro-machining, micro-, nano- and meso-scale electromechanical devices and integrated circuits (ICs), when combined, provide enabling benefits and capabilities to manufacture microelectromechanical systems (MEMS). Critical issues to be solved are to improve power and thermal management, circuitry and actuator/sensor integration, and embedded electronically controlled micro-actuator assemblies. Very large scale integrated circuit and micromachining silicon, germanium, and gallium arsenic technologies have been developed and used to manufacture ICs and micro-actuators. While promising developments have been deployed to fabricate MEMS, a spectrum of challenging problems to be solved remains. In order to improve the performance, the motion control problem must be addressed and solved, particularly in prospective applications of MEMS in aerospace and automotive industry, where microactuators, multistable relays, micro-connectors, micropropulsion, micro-optical systems, as well as active control micro-devices are used. The solution of a spectrum of problems in nonlinear analysis, design and optimization of MEMS lead to the development of superior MEMS. Analytical, numerical, and experimental results are presented to demonstrate the methods and algorithms applied in nonlinear analysis, design, and control.
Starting Page	2611
Ending Page	2616
File Size	549553
Page Count	6
File Format	PDF
ISBN	0780352505
ISSN	01912216
DOI	10.1109/CDC.1999.831322
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-12-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Centralized control Microactuators Micromechanical devices Algorithm design and analysis Integrated circuit manufacture Thermal management of electronics Motion control Aerospace industry Nanoscale devices Electromechanical devices
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Microelectromechanical systems

A new age for MEMS

MEMS commercialization activities at MCNC

Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution?

Micro-electromechanical systems: motion control of micro-actuators

Design and characterization of MEMS thermal actuator

C2W bonding method for MEMS applications

Dynamic Modeling and Transient Performance Analysis of a LHP-MEMS Thermal Management System for Spacecraft Electronics

Multiple criterion optimization with yield maximization

Integrated control of microactuators and integrated circuits: a new turning approach in MEMS technology

Similar Documents

Microelectromechanical systems

A new age for MEMS

MEMS commercialization activities at MCNC

Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution?

Micro-electromechanical systems: motion control of micro-actuators

Design and characterization of MEMS thermal actuator

C2W bonding method for MEMS applications

Dynamic Modeling and Transient Performance Analysis of a LHP-MEMS Thermal Management System for Spacecraft Electronics

Multiple criterion optimization with yield maximization

Integrated control of microactuators and integrated circuits: a new turning approach in MEMS technology