NDLI: Application of locally weighted partial least squares to design of semiconductor virtual metrology

Content Provider	IEEE Xplore Digital Library
Author	Hirai, T. Hazama, K. Kano, M.
Copyright Year	2014
Description	Author affiliation: Dept. of Syst. Sci., Kyoto Univ., Kyoto, Japan (Hazama, K.; Kano, M.) \|\| Sony Energy Devices Corp., Koriyama, Japan (Hirai, T.)
Abstract	In the semiconductor industry, virtual metrology (VM) has been widely investigated and used to predict important characteristics of products. However, VM is not always successful because its prediction performance deteriorates due to changes in process characteristics. In particular, maintenance of equipment strongly affects the process characteristics and the prediction performance. In the present work, VM was developed by using locally weighted partial least squares (LW-PLS), which is a type of Just-In-Time modeling technique. The developed VM was applied to a dry etching process and a chemical mechanical polishing (CMP) process. The industrial application results have shown that the developed VM based on LW-PLS is superior to the conventional VM based on sequential update model (SUM), locally weighted regression (LWR), and PLS. Furthermore, it has been confirmed that the LW-PLS-based VM can keep its high prediction performance even after the maintenance, i.e. replacement of parts.
Starting Page	1771
Ending Page	1776
File Size	587302
Page Count	6
File Format	PDF
ISBN	9781479974092
DOI	10.1109/CCA.2014.6981569
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-10-08
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Dry etching Maintenance engineering Input variables Semiconductor device modeling Data models Vectors
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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