NDLI: Uncoated SAW delay lines as thermal gas detector

Content Provider	IEEE Xplore Digital Library
Author	Penza, M. Anisimkin, V.I. Vasanelli, L.
Copyright Year	1996
Description	Author affiliation: PASTIS-CNRSM, Brindisi, Italy (Penza, M.)
Abstract	A SAW delay line, without any absorbent film between the interdigital transducers, has been developed as a thermal gas detector. The change of the thermal conductivity of the ambient atmosphere produces a change of substrate temperature thereby causing a SAW phase variation (SAW response) at the output of the device. Different effects contribute to the SAW response such as the thermal conductivity /spl Delta//spl lambda/, flow rate /spl Delta/u, dynamic viscosity /spl Delta//spl mu/, and the density /spl Delta//spl rho/ of the test ambient and they are numerically analysed for each test gas. Uncoated SAW delay lines operating at 41-263 MHz are implemented on SiO/sub 2/, LiNbO/sub 3/, Bi/sub 12/GeO/sub 20/, and Bi/sub 12/SiO/sub 20/ substrates. The gases under test (H/sub 2/, He, Ar, CH/sub 4/, NH/sub 3/, N/sub 2/, O/sub 2/, dry air) are used within concentrations of 0.1-100% and flow rates of 50-2000 mL/min at 20-150/spl deg/C and atmospheric pressure. The SAW response /spl Delta//spl phi///spl phi/, is measured as function of /spl Delta//spl lambda/, /spl Delta/u, operating temperature, and gas concentration. The SAW prototype has a good sensitivity: /spl Delta//spl phi///spl phi//spl equiv/15 ppm to 0.7% CH/sub 4/ in N/sub 2/ for a Bi/sub 12/SiO/sub 20/ delay line heated at 120/spl deg/C; /spl Delta//spl phi///spl phi//spl equiv/15 ppm to 0.4% NH/sub 3/ in N/sub 2/ for a YZ-LiNbO/sub 3/ delay line heated at 120/spl deg/C. Some selective SAW gas responses are discussed.
Starting Page	1411
Ending Page	1414
File Size	446781
Page Count	4
File Format	PDF
ISBN	0780331095
DOI	10.1109/MELCON.1996.551212
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-05-16
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface acoustic waves Delay lines Gas detectors Thermal conductivity Testing Bismuth Substrates Transducers Atmosphere Temperature
Content Type	Text
Resource Type	Article

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