NDLI: Improved Microwave Modeling of CMOS Spiral Inductors with Metal Dummy Fills

Content Provider	IEEE Xplore Digital Library
Author	Lan Nan Mouthaan, K. Yong-Zhong Xiong Jinglin Shi Rustagi, S.C. Ban-Leong Ooi
Copyright Year	2008
Description	Author affiliation: Inst. of Microelectron., Agency for Sci., Singapore, Singapore (Yong-Zhong Xiong; Jinglin Shi; Rustagi, S.C.) \|\| Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore (Lan Nan; Mouthaan, K.; Ban-Leong Ooi)
Abstract	In advanced CMOS technologies, the insertion of metal dummy fills is unavoidable due to stringent metal density process requirements. Therefore existing compact models for on-chip components need to be updated to accurately account for the effect of these metal dummy fills in CMOS RFIC designs. This paper proposes a simple but accurate method to predict the microwave behavior of on-chip spiral inductors with metal dummy fills. Experimental results show that the increase in the dioxide capacitance $C_{ox}$ is the dominant factor leading to the decrease in $Q_{max}$ and $f_{max}.$ Two methods are adopted to calculate the change in the dioxide capacitance of on-chip inductors due to the metal dummy fills. Good agreement is achieved between the predicted and measured performance of inductors with metal dummy fills by updating $C_{ox}$ in the conventional models.
Starting Page	275
Ending Page	278
File Size	1832989
Page Count	4
File Format	PDF
ISBN	9781424421176
DOI	10.1109/EPTC.2008.4763447
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-12-09
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Semiconductor device modeling Spirals Inductors CMOS technology Capacitance CMOS process Radiofrequency integrated circuits Microwave theory and techniques Lead compounds Predictive models
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Experimental Characterization of the Effect of Metal Dummy Fills on Spiral Inductors

Monolithic Spiral Inductors for a 0.25 μm Digital CMOS Process

Modeling of on-chip spiral inductors with a center-tap

Impact of Metal Dummy Fills on the Performance of CMOS Inductors

CMOS technology-based spiral inductors for RF applications

Modeling and analysis of multilevel spiral inductors for RFICs

Modeling and performance of spiral inductors in SOI CMOS technology

Scalable modeling of spiral inductor in 0.13μm RF CMOS process

Modeling of spiral inductors on lossy substrates for RFIC applications

Improved Microwave Modeling of CMOS Spiral Inductors with Metal Dummy Fills

Similar Documents

Experimental Characterization of the Effect of Metal Dummy Fills on Spiral Inductors

Monolithic Spiral Inductors for a 0.25 μm Digital CMOS Process

Modeling of on-chip spiral inductors with a center-tap

Impact of Metal Dummy Fills on the Performance of CMOS Inductors

CMOS technology-based spiral inductors for RF applications

Modeling and analysis of multilevel spiral inductors for RFICs

Modeling and performance of spiral inductors in SOI CMOS technology

Scalable modeling of spiral inductor in 0.13μm RF CMOS process

Modeling of spiral inductors on lossy substrates for RFIC applications

Improved Microwave Modeling of CMOS Spiral Inductors with Metal Dummy Fills