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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Songfang Zhao Guoping Zhang Rong Sun Lee, S.W.R. |
| Copyright Year | 2013 |
| Description | Author affiliation: Dept. of Mech. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong, China (Lee, S.W.R.) || Shenzhen Inst. of Adv. Technol., Shenzhen, China (Songfang Zhao; Guoping Zhang; Rong Sun) |
| Abstract | 3D packaging using through silicon via (TSV) technology is becoming important in the integrated circuit (IC) packaging industry. This paper reports the wetting behavior of polymer liquids in the insulation deposition process by spin coating. Two methods containing adding wetting agent into polymer liquid and coupling agent treatments to wafer surface were implemented to improve the wettability between the liquid and the wafer. From the viscosity tests, it was found that the wetting agent could improve the flowability and have little effect on the thixotropy of liquid. Besides, the surface tension of liquid was shifted to 31.14 mN/m from 32.16 mN/m with the addition of wetting agent. The coupling agent treatment to sidewall of vias (silicon) could increase the adhesion work value by at least 8 mN/m and avoid the sagging. Moreover, the wetting dynamics revealed that adding wetting agent to polymer liquid and coupling agent treatments to wafer could improve the wetting rate and decrease the balanced contact angle. |
| Sponsorship | IEEE Compon., Packag. Manuf. Technol. Soc. |
| Starting Page | 360 |
| Ending Page | 363 |
| File Size | 662267 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479904983 |
| DOI | 10.1109/ICEPT.2013.6756489 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-08-11 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Liquids Polymers Silicon Surface treatment Viscosity Adhesives Insulation balanced contact angle through silicon via wetting behavior wettability |
| Content Type | Text |
| Resource Type | Article |
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