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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Mahanpour, M. Morgan, I. |
| Copyright Year | 1995 |
| Description | Author affiliation: Adv. Micro Devices Inc., Sunnyvale, CA, USA (Mahanpour, M.; Morgan, I.) |
| Abstract | A previous study by L. G. Henry et al. (see Proceedings 20th ISTFA, Los Angeles, p. 117-26, Nov. 1994) considered in detail an early die revision of a CMOS logic product fabricated using an N-well technology, that showed a higher than expected rate of EOS failure during burn-in and for customer field returns. It was shown that the use of a specific laboratory model simulator can most often replicate a failure signature, i.e., a unique damage morphology and die location associated with a real product failure. A "nondestructive" failure signature induced by Transient Latch-Up (TLU) was described and is studied here in more detail. Five different failure mechanisms were found in the area where Latch-Up (LU) was located by emission microscopy: fusing of the V/sub cc/ metal-bus, metal-metal shorts, metal-poly shorts, gate oxide defects, and a carrier storage effect. This study shows that 90% of all defects identified were within or in close proximity to the latch-up sites. These several failure mechanisms and their relation to LU are discussed. |
| Starting Page | 289 |
| Ending Page | 294 |
| File Size | 943965 |
| Page Count | 6 |
| File Format | |
| ISBN | 1878303597 |
| DOI | 10.1109/EOSESD.1995.478296 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1995-09-12 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Failure analysis CMOS logic circuits CMOS technology Earth Observing System Laboratories Semiconductor device modeling Morphology Microscopy |
| Content Type | Text |
| Resource Type | Article |
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