NDLI: Contributions to an ultra-high temperature (250°C/500°F) bearingless pump

Content Provider	IEEE Xplore Digital Library
Author	Wellerdieck, T. Peralta, P. Nussbaumer, T. Kolar, J.W.
Copyright Year	2015
Description	Author affiliation: Levitronix GmbH, Zurich, Switzerland (Nussbaumer, T.) \|\| Power Electron. Syst. Lab., Switzerland Levitronix GmbH, Zurich, Switzerland (Wellerdieck, T.; Peralta, P.; Kolar, J.W.)
Abstract	The semiconductor industry demands for pumps which handle aggressive fluids at very high temperatures, as this is an important step towards higher process speeds and increased yield in semiconductor etching applications. This paper presents the thermal, electrical and mechanical design of a bearingless pump for operating temperatures of up to 250 °C without active cooling. A detailed thermal analysis of the machine is presented which allows for the prediction of the thermal stress of critical components. The machine design is based on the prediction of the internal temperatures and hydraulic specifications of the pump. Furthermore, a hallsensorless, observer-based, control of the rotor angle is presented. The necessity for this control scheme arises from the high temperatures that prevent the usage of conventional angle measurement systems.
Starting Page	1158
Ending Page	1164
File Size	422176
Page Count	7
File Format	PDF
e-ISBN	9781479988051
DOI	10.1109/ICEMS.2015.7385214
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-10-25
Publisher Place	Thailand
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature measurement Pumps Plasma temperature Heat transfer Temperature sensors Substrates Thermal resistance sensorless control bearingless disk motor permanent magnet motor high temperature
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in