NDLI: Fritting Contact Using SnAu probe

Content Provider	IEEE Xplore Digital Library
Author	Kataoka, K. Inoue, K. Itoh, T. Suga, T.
Copyright Year	2007
Description	Author affiliation: Tokyo Electron AT Ltd., Nirasaki (Kataoka, K.)
Abstract	We report on the contact process utilizing fritting phenomena between Al electrode and probes made of tin or tin gold alloy. The contact method with low contact force on Al electrodes is required for test probing of LSI for the next generation. The test probes made of tungsten or nickel are suitable for making contact with mechanical breaking of aluminum oxide. However, when these hard probes are used for fritting contact process, aluminum debris adheres to the probes and the contact failure occurs after several hundred contacts. In order to solve this problem, the low-force contact properties of soft probes are investigated in this paper. It was found that the mixture or alloy of tin and aluminum is generated in the contact area and remains on both the probe and the aluminum electrode after breaking the contact. Moreover, the probe made of tin-gold alloy is found to accumulate less aluminum debris and the contact resistance remains lower than 10 Omega after 1,000 contacts.
Starting Page	151
Ending Page	155
File Size	1482994
Page Count	5
File Format	PDF
ISBN	1424408377
DOI	10.1109/HOLM.2007.4318209
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-09-16
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Probes Electrodes Tin Testing Aluminum alloys Gold alloys Large scale integration Tungsten Nickel Aluminum oxide tin-gold alloy aluminum oxide low-force contact fritting contact LSI probing tin
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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