NDLI: MEMS lithography collaborative simulation environment research

Content Provider	IEEE Xplore Digital Library
Author	Lianguan Shen Meiyan Wang Yu Hao Gaofei Zhao Zhao Shu Sun Yuan Xiaodong Wang Mujun Li Jinjin Zheng
Copyright Year	2008
Description	Author affiliation: Dept. of Precision Machinery & Precision Instrum., Univ. of Sci. & Technol. of China, Hefei (Lianguan Shen; Meiyan Wang; Yu Hao; Gaofei Zhao; Zhao Shu; Sun Yuan; Xiaodong Wang; Mujun Li; Jinjin Zheng)
Abstract	A web-based collaborative design platform is presented for design MEMS structure. The design platform consists of four parts: mask design and optimization, lithography simulation, 3D reconstruction and synchronous display. Some special technologies in constructing the platform are described. An entity- based access control mechanism is employed to settle confliction in collaborative design process; MC algorithm is used to reconstruct 3D entities. A method is proposed to make up for the shortfall of MC to cover the holes in forming 3D surface. Application of the research will shorten the production cycle of MEMS and access higher accuracy significantly.
Starting Page	913
Ending Page	918
File Size	631956
Page Count	6
File Format	PDF
ISBN	9781424416509
DOI	10.1109/CSCWD.2008.4537101
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-04-16
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Lithography Collaboration Design optimization Three dimensional displays Access control Process design Algorithm design and analysis Surface reconstruction Production Synchronous display Collaborative Design Confliction avoid 3D reconstruction MEMS
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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