NDLI: Configuring AVM as a MES component

Content Provider	IEEE Xplore Digital Library
Author	Fan-Tien Cheng Chang, J.Y.-C. Chi-An Kao Ying-Lin Chen Ju-Lei Peng
Copyright Year	2010
Description	Author affiliation: Foresight Technology Company, Ltd., Tainan, Taiwan, R.O.C. (Chi-An Kao; Ying-Lin Chen; Ju-Lei Peng) \|\| Institute of Manufacturing Information and Systems, National Cheng Kung University Tainan, Taiwan, R.O.C., No. 1, University Rd., 70101 Tainan, Taiwan, R.O.C. (Fan-Tien Cheng; Chang, J.Y.-C.)
Abstract	A typical 65nm manufacturing process normally contains 400–500 process steps. Many factors in production line could cause production quality shift and/or drift. Especially, when a new process to include more functions in a die is under development, a higher failure rate will be encountered. As a result, frequent monitoring in both tool and process is required to detect the quality issue early so as to improve the process stability of semiconductor manufacturing. However, more tool and process monitoring means more metrology operation cost and longer cycle time. Recently, a promising technology denoted virtual metrology (VM) is blooming. VM can convert sampling inspection with metrology delay into real-time and on-line total inspection. Therefore, VM has now been designated by International SEMATECH Manufacturing Initiative (ISMI) and International Technology Roadmap for Semiconductors (ITRS) as one of the focus areas for the next generation factory realization roadmap of the semiconductor industry. The authors have developed the so-called automatic virtual metrology (AVM) system to implement and deploy the VM operations automatically. This paper proposes a novel manufacturing system that integrates AVM into the manufacturing execution system (MES). The interfaces among AVM, other MES components, and R2R (run-to-run) modules in the novel manufacturing system are also defined such that the capabilities of AVM can be accomplished. The AVM capabilities include 1) converting sampling inspection with metrology delay into real-time and on-line total inspection; 2) control/monitoring workpieces reduction/elimination; and 3) supporting wafer-to-wafer (W2W) advanced process control.
Starting Page	226
Ending Page	231
File Size	375964
Page Count	6
File Format	PDF
ISBN	9781424465170
ISSN	10788743
e-ISBN	9781424465194
DOI	10.1109/ASMC.2010.5551454
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-07-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Metrology Production Monitoring Inspection Manufacturing Servers Data models wafer-to-wafer (W2W) control Automatic virtual metrology (AVM) manufacturing execution system (MES) run-to-run (R2R) control
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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