NDLI: Software reliability qualification for semi-conductor manufacturing systems

Content Provider	IEEE Xplore Digital Library
Author	de Jong, I.S.M. Boumen, R. van de Mortel-Fronczak, J.M. Rooda, J.E.
Copyright Year	2007
Description	Author affiliation: ASML, Veldhoven (de Jong, I.S.M.)
Abstract	The duration of the reliability qualification test for a new software release at ASML is derived from the SEMI-E10 standard. A system level 'run production' test case is used for qualification, even if specific sub-system test cases could reach the target confidence faster. The confidence in the reliability of a sub-system can be increased faster by utilizing sub-system test cases, because sub-system test cases can stress a sub-system more in the same amount of time. The normal approach from the reliability engineering domain to utilize the sub-system test cases is difficult to set up and maintain. This paper presents a simple and intuitive reliability qualification method which benefits from sub-system test cases. The proposed method is compared with the SEMI-E10 standard. And, two case studies have been performed which show the applicability for software reliability qualification.
Starting Page	326
Ending Page	332
File Size	2860680
Page Count	7
File Format	PDF
ISBN	1424406528
DOI	10.1109/ASMC.2007.375058
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-11
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Software reliability Qualifications Manufacturing systems System testing Software testing Software standards Production systems Stress Reliability engineering Maintenance SEMI-E10 Wafer scanner software reliability qualification reliability test modeling test sequencing
Content Type	Text
Resource Type	Article

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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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