NDLI: Next generation manufacturing execution system (mes) enabling fully integrated fab automation in 300mm technology development and manufacturing

Content Provider	IEEE Xplore Digital Library
Author	Mouli, C.
Copyright Year	2005
Description	Author affiliation: Logic Technol. Dev., Intel Corp., Hillsboro, OR (Mouli, C.)
Abstract	After a three year development and integration effort, Intel has successfully implemented a next generation MES system (referred to as MES300 henceforth this paper) in its state-of-the-art Technology Development fab DID, Oregon. MES300 provides integration of all MES functionality in an extensible framework based architecture, thereby enabling delivery of an active, fab event driven suite of capabilities. The new system provides flexibility in modeling and executing technology development in an automated fab operations environment, thereby delivering world-class information turns crucial for rapid process development. In addition, the new system enables fully automated fab operations for efficient high-volume manufacturing. MES300 is currently being simultaneously deployed in two other 300 mm high-volume manufacturing fabs as part of the 65 nm process technology transfer. This paper will include the following sections: (a) 300 mm automation drivers; (b) 300 mm technology and manufacturing requirements, legacy MES system deficiencies; (c) key elements of the next generation MES architecture implemented at Intel; (d) brief review of system design, development, test and deployment strategy; (e) sample of key capabilities delivered to date in DID/65 nm generation.; and (f) look-ahead on how MES300 is being leveraged to delivering industry leading automation capabilities in the next couple of year
Starting Page	77
Ending Page	85
File Size	1368417
Page Count	9
File Format	PDF
ISBN	0780389972
DOI	10.1109/ASMC.2005.1438771
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-04-11
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Manufacturing automation Automatic control Pulp manufacturing Control systems Costs Manufacturing processes Process control Automatic testing System testing Materials handling
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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