NDLI: Long throw and i-PVD liners for W-plug contact and via applications

Content Provider	IEEE Xplore Digital Library
Author	Burgess, S.R. Buchanan, K.E. Butler, D.C. Urbansky, N. Schmidbauer, S.
Copyright Year	2001
Description	Author affiliation: Trikon Technol., Newport, UK (Burgess, S.R.)
Abstract	Results are presented for long throw and ionized PVD layers for W-plug liner applications. 245 mm and 430 mm long throw modules are discussed, the latter being shown to be applicable to sub-0.17 /spl mu/m contacts when combined with very low process pressures. Data is presented showing that stable contacts can be produced without the damage risks associated with high energy ionized PVD processes. For metal applications above contact, a novel PVD module is shown to have particular benefits at via level. Chain data is presented showing >15% reduction in via resistance compared to any combination of i-PVD/long throw Ti/TiN sequences.
Starting Page	97
Ending Page	100
File Size	472774
Page Count	4
File Format	PDF
ISBN	0780365550
ISSN	10788743
DOI	10.1109/ASMC.2001.925625
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-04-23
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Atherosclerosis Tin Manufacturing processes Contact resistance Integrated circuit interconnections Random access memory Particle production Collimators Costs Substrates
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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