NDLI: In-fab identification of silicon wafers with clean, laser marked barcodes

Content Provider	IEEE Xplore Digital Library
Author	Fresonke, D.
Copyright Year	1994
Description	Author affiliation: AT&T Bell Labs., Orlando, FL, USA (Fresonke, D.)
Abstract	All AT&T MOS cleanrooms uniquely identify and track individual wafers in the manufacturing process. Recently, we have developed a new technique to put a laser marked barcode on the front surface of the wafer which adds no detectable particles. The mark itself is an adaptation of the SEMI T1 specification which is popularly referred to as BC412. Unlike the SEMI specification, our BC412 barcode is marked on the top of the wafer during the actual wafer fabrication process. Since the marking is done in the cleanroom, a clean marking technology is absolutely essential. Also the front side mark presents challenges to the barcode readers due to process related surface variations. This paper discusses the reasons for individual wafer tracking and reviews some of the benefits we have seen in practice. We compare the front side, clean barcode to other types of wafer identification techniques. We also discuss the marking technology required for clean marking and the reading technology necessary for front side BC412.
Starting Page	157
Ending Page	160
File Size	600717
Page Count	4
File Format	PDF
ISBN	0780320530
DOI	10.1109/ASMC.1994.588232
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1994-11-26
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Production Surface cleaning Humans Intrusion detection Testing Packaging machines Manufacturing processes Surface emitting lasers Fabrication
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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