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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jizheng Qiu Sullivan, C.R. |
| Copyright Year | 2012 |
| Description | Author affiliation: Thayer School of Engineering at Dartmouth, 8000 Cummings Hall, Hanover, NH 03755 (Jizheng Qiu; Sullivan, C.R.) |
| Abstract | Thin-film nanogranular magnetic materials are attractive for micro-fabricated very-high-frequency power magnetics, but their anisotropy makes them difficult to use in toroidal geometries. A method to deposit magnetic materials with the radial anisotropy required for high-performance toroidal inductors is introduced in this paper. The radial anisotropy is induced during sputter deposition of Co-Zr-O thin films by an applied radial magnetic field. A magnetic field orientation fixture which consists of two magnets and iron components is designed to create a radial field predominantly parallel to the substrate plane. Initial prototype toroidal cores with 8-mm inside diameter, 16-mm outside diameter, and thickness of 6 μm have been fabricated. Hysteresis measurements along the radial direction (easy axis) and the circumferential direction (hard axis) of deposited samples show the desired anisotropy orientation. Small-signal measurements show that the fabricated toroidal core has flat relative permeability near 60 to several hundred megahertz, and reaches a quality factor higher than 100 in the range of tens of megahertz. |
| Starting Page | 491 |
| Ending Page | 497 |
| File Size | 795045 |
| Page Count | 7 |
| File Format | |
| ISBN | 9781457712159 |
| e-ISBN | 9781457712166 |
| e-ISBN | 9781457712142 |
| DOI | 10.1109/APEC.2012.6165865 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-02-05 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Magnetic hysteresis Toroidal magnetic fields Magnetic cores Magnetic materials Substrates Inductors Magnetic anisotropy |
| Content Type | Text |
| Resource Type | Article |
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