NDLI: Novel ultrasensitive millimeter-wave pressure transducer utilizing a Si membrane and a stacked-patch configuration

Content Provider	IEEE Xplore Digital Library
Author	Thai, T.T. DeJean, G.R. Tentzeris, M.M.
Copyright Year	2009
Description	Author affiliation: School of ECE, Georgia Institute of Technology, Atlanta, GA 30332, USA (Thai, T.T.; Tentzeris, M.M.) \|\| Microsoft Research, One Microsoft Way, Redmond, WA 98052, USA (DeJean, G.R.)
Abstract	A new highly sensitive radio frequency pressure transducer has been designed to operate in the millimeter wave frequency range that can be seamlessly integrated with other RF circuits in the LTCC multilayer packaging technology. The resonator consists of a stacked-patch based on LTCC multilayer packaging technology, having an air cavity embedded by a silicon (Si) diaphragm that deflects due to pressure change. Furthermore, the RF transducer presented here, operating in two frequency bands between 30–55 GHz, serves as both a wireless communications link and a remote sensing differential pressure indicator. This device can simultaneously simplify the design process, reduce the device's size, and reduce power consumption of the sensor at device level, providing a sensitivity of 116 MHz/um with respect to the diaphragm deflection due to pressure change. The pressure inside the air cavity can be calibrated to detect differential pressure anywhere from zero to several bars. The transducer can be directly employed in a typical remote sensing / radar system without the need for additional circuits such transceivers required in traditional wired transducers. Thus, it significantly reduces the power consumption and greatly minimize the sensor. Due to its high sensitivity and portability, in future work the RF transducer design will be modified to use multilayer organics, such as LCP so that it may be utilized as wireless implantable sensors for biomedical applications and conformal structural health monitoring devices. A prototype of the RF transducer will also be presented to demonstrate the operation of the device.
Starting Page	1
Ending Page	4
File Size	952286
Page Count	4
File Format	PDF
ISBN	9781424436477
ISSN	15223965
DOI	10.1109/APS.2009.5171876
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-06-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Biomembranes Radio frequency Millimeter wave technology Nonhomogeneous media Biomedical transducers Millimeter wave integrated circuits Millimeter wave radar Packaging Integrated circuit technology Remote sensing
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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