NDLI: A RF mass-sensitive SAW sensor with U-groove structure

Content Provider	IEEE Xplore Digital Library
Author	Dazhong Zhu Jiahua Zhu
Copyright Year	2001
Description	Author affiliation: Product Realization & Design Center, Motorola Inc., South Plainfield, NJ, USA (Dazhong Zhu)
Abstract	A novel mass-sensitive SAW sensor with U-groove structure which uses the mass-loading effect of surface acoustic waves is proposed. This sensor works at RF frequency range from several decade MHz to several hundred MHz. There is a 10 /spl mu/m deep U-groove structure in the middle of the surface acoustic wave path on ZnO/SiO/sub 2//Si piezoelectric film substrate. A SAW oscillator, with input and output IDTs, is fabricated on each side of the U-groove. The U-groove is used to contain a certain amount of the liquid mixture for testing. After evaporation of the tested liquid mixture, the remaining material is deposited on the bottom of the U-groove to give the required mass-loading on the surface acoustic wave path. The loading material reduces the center frequency of the SAW sensor and increases its insertion loss. The loading mass surface density and the density in the liquid can be calculated by analyzing the shifted frequency response according to the mass-loading frequency equation. A SAW oscillating circuit is connected to the input IDT and output IDT to cause the oscillation and increase its Q value. It increases the sensitivity of the frequency shift via loading material density. When an amplifier is connected to the input and output IDT, an 11 dB decrease of insertion loss is obtained also. A prototype device has been fabricated on a LiNbO/sub 3/ wafer with a central frequency of 165 MHz. A sensitivity of 1 ppm frequency shift per 0.04 micrograin/cm/sup 2/ loading mass density is obtained. This device will be competitive in real-time liquid components analyzing and will be an excellent unit cell for an addressable biochip.
Starting Page	350
Ending Page	353
File Size	167015
Page Count	4
File Format	PDF
ISBN	0780370708
DOI	10.1109/APS.2001.958865
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-07-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radio frequency Surface acoustic waves Acoustic sensors Acoustic waves Acoustic testing Insertion loss Zinc oxide Piezoelectric films Substrates Oscillators
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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