NDLI: Spectroscopic Analysis of Microwave-Generated Plasmas

Content Provider	IEEE Xplore Digital Library
Author	Schumacher, U. Stirn, R. Ene, A.B. Hirsch, K. Leins, M. Lindner, P. Schulz, A. Walker, M.
Copyright Year	1973
Abstract	Aiming at understanding and controlling the major mechanisms and processes in microwave-generated plasmas, the ground-state densities of the most relevant atomic species and their spatial distributions were determined in these plasmas. They can be measured by optical emission and absorption spectroscopy. Similar to the determination of the silicon ground-state density from the analysis of the self-absorbed spectral lines of the silicon ground-state multiplet 3p ²³ P-3p4s ³ P ⁰ in the ultraviolet range at about 251 nm, the neutral concentrations of other species like carbon and titanium were evaluated from further spectroscopic analyses. Furthermore, the spatial distributions were explored in detail. New developments of microwave-generated plasma sources and their optical emission spectroscopy to investigate the kind of species in the plasmas, as well as the gas and excitation temperatures, are also presented.
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	1836
Ending Page	1842
Page Count	7
File Size	729830
File Format	PDF
ISSN	00933813
Volume Number	37
Issue Number	9
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Spectroscopy Plasma measurements Plasma density Stimulated emission Silicon Plasma sources Plasma temperature Atomic measurements Atom optics Electromagnetic wave absorption plasma technology Emission and absorption spectroscopy excitation temperature ground-state density microwave-generated plasmas
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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