NDLI: MEMS technology for timing and frequency control

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society - staff

IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society

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In this issue - Technically

In this issue - Technically

Comments on Frequency shifts in a resonator due to submersion in a fluid

Thickness-Twist Edge Modes in a Semi-Infinite Piezoelectric Plate of Crystals with 6mm Symmetry (Letters)

Tunable Ferroelectric Capacitor-Based Voltage-Controlled Oscillator

Experimental Measurement and Numerical Analysis on Resonant Characteristics of Cantilever Plates for Piezoceramic Bimorphs

Application of the nonlinear, double-dynamic taguchi method to the precision positioning device using combined piezo-vcm actuator

MEMS technology for timing and frequency control

Parallel beamforming using synthetic transmit beams

Finite element analysis of tissue deformation with a radiofrequency ablation electrode for strain imaging

Detection of tissue harmonic motion induced by ultrasonic radiation force using pulse-echo ultrasound and kalman filter

A parallel tracking method for acoustic radiation force impulse imaging

Interactive volume rendering of real-time three-dimensional ultrasound images

Barker-coded ultrasound color flow imaging: theoretical and practical design considerations

Optimal apodization design for medical ultrasound using constrained least squares part I: theory

Optimal apodization design for medical ultrasound using constrained least squares part II simulation results

Multilayer modal actuator-based piezoelectric transformers

Interaction of lamb modes with delaminations in plates coated by highly absorbing materials

Acoustic impact localization in plates: properties and stability to temperature variation

An ultrasonic theoretical and experimental approach to determine thickness and wave speed in layered media

The frequency-dependent directivity of a planar fabry-perot polymer film ultrasound sensor

Investigation of the scaling rules determining the performance of film bulk acoustic resonators operating as mass sensors

Design and properties of STW asynchronous resonators on quartz

Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays

Modular design for in vivo optical imaging and ultrasound treatment in the murine brain

Detection of coagulating blood under steady flow by statistical analysis of backscattered signals

A low-cost bipolar pulse generator for high-frequency ultrasound applications

TheoH and allan deviation as power-law noise estimators

Analogs of Brewster's angles for surface acoustic waves: the dependence on the strip shape

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MEMS technology for timing and frequency control

Content Provider	IEEE Xplore Digital Library
Author	Nguyen, C.T.-C.
Copyright Year	1986
Abstract	An overview on the vise of microelectromechanical systems (MEMS) technologies for timing and frequency control is presented. In particular, micromechanical RF filters and reference oscillators based on recently demonstrated vibrating on-chip micromechanical resonators with Q's > 10,000 at 1.5 GHz are described as an attractive solution to the increasing count of RF components (e.g., filters) expected to be needed by future multiband, multimode wireless devices. With Q's this high in on-chip abundance, such devices might also enable a paradigm shift in the design of timing and frequency control functions, where the advantages of high-Q are emphasized, rather than suppressed (e.g., due to size and cost reasons), resulting in enhanced robustness and power savings. Indeed, as vibrating RF MEMS devices are perceived more as circuit building blocks than as stand-alone devices, and as the frequency processing circuits they enable become larger and more complex, the makings of an integrated micromechanical circuit technology begin to take shape, perhaps with a functional breadth not unlike that of integrated transistor circuits. With even more aggressive three-dimensional MEMS technologies, even higher on-chip Q's are possible, such as already achieved via chip-scale atomic physics packages, which so far have achieved Q's > 10⁷ using atomic cells measuring only 10 mm³ in volume and consuming just 5 mW of power, all while still allowing atomic clock Allan deviations down to 10^-11 at one hour
File Size	2677502
File Format	PDF
ISSN	08853010
Volume Number	54
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-02-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Timing Frequency control Atomic measurements Radio frequency Resonator filters Integrated circuit technology Microelectromechanical systems Oscillators Cost function
Content Type	Text
Resource Type	Article
Subject	Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering

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