NDLI: On the Deembedding Issue of CMOS Multigigahertz Measurements

Content Provider	IEEE Xplore Digital Library
Author	Issaoun, A. Yong Zhong Xiong Jinglin Shi Brinkhoff, J. Fujiang Lin
Copyright Year	1963
Abstract	The purpose of this paper is to address the issues of deembedding multigigahertz CMOS measurements by extensively comparing six popular methods and by proposing a new method based on two-port measurements. The comparison aims to evaluate the maximum applicable frequency of equivalent-circuit methods (open-short, three step, ...) and the effect of the source dangling leg of MOSFETs on the cascade methods (two line and thru). Fifty dummy structures and 12 MOSFETs were fabricated using standard 0.18-mum CMOS technology. It was found that, at low frequencies (<6 GHz), all method results were comparable. The open-short method performed well over the entire frequency range (0.1-40 GHz) studied. The newly developed method, called the thru-short method, uses only two dummy structures, a thru and a short, to completely deembed the parasitics from probe pads, interconnects, and the semiconducting substrate. The measurements validated the thru-short algorithm and showed its usefulness for multigigahertz on-wafer CMOS measurements.
Sponsorship	IEEE Microwave Theory and Techniques Society
Starting Page	1813
Ending Page	1823
Page Count	11
File Size	2600655
File Format	PDF
ISSN	00189480
Volume Number	55
Issue Number	9
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Frequency Leg CMOS technology Semiconductor device modeling Probes Integrated circuit interconnections Substrates Calibration MOSFETs Semiconductivity two line Deembedding methods four step improved three step on-wafer measurements open-short three step thru thru-short
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering Radiation

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