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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Bjurstrom, J. Wingqvist, G. Katardjiev, I. |
| Copyright Year | 1986 |
| Abstract | A method for the deposition of thin piezo-electric aluminum nitride (AlN) films with a nonzero c-axis mean tilt has been developed. The deposition is done in a standard reactive magnetron sputter deposition system without any hardware modifications. In essence, the method consists of a two-stage deposition process. The resulting film has a distinct tilted texture with the mean tilt of the c-axis varying roughly in the interval 28 to 32 degrees over the radius of the wafer excluding a small exclusion zone at the center of the latter. The mean tilt angle distribution over the wafer has a circular symmetry. A membrane-type shear mode thickness-excited thin film bulk acoustic resonator together with a micro-fluidic transport system has been subsequently fabricated using the two stage AlN de-position as well as standard bulk micro machining of Si. The resonator consisted of a 2-mum-thick AlN film with 200-nm-thick Al top and bottom electrodes. The resonator was characterized with a network analyzer when operating in both air and water. The shear mode resonance frequency was about 1.6 GHz, the extracted device Q around 350, and the electromechanical coupling kt 2 2% when the resonator was operated in air, whereas the latter two dropped down to 150 and 1.8%, respectively, when the resonator was operated in pure water |
| File Size | 740379 |
| File Format | |
| ISSN | 08853010 |
| Volume Number | 53 |
| Issue Number | 11 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2006-11-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Piezoelectric films Fabrication Aluminum nitride Sputtering Hardware Semiconductor thin films Machining Film bulk acoustic resonators Semiconductor films Electrodes |
| Content Type | Text |
| Resource Type | Article |
| Subject | Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering |
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