NDLI: Nonscanning measurements for determining in-plane mode shapes in piezoelectric devices with polished surfaces

Content Provider	IEEE Xplore Digital Library
Author	Watanabe, Y. Goka, S. Sato, T. Sekimoto, H.
Copyright Year	1986
Abstract	A nonmechanical scanning method has been developed for the visualization of the in-plane mode shapes of piezoelectric devices with polished surfaces. By taking into account the reflection versus laser-wavelength characteristics of the material of the electrodes, the in-plane motion can be measured even if the surface of the measurement plane is polished like a mirror. This method is based on laser speckle interference and two-dimensional correlation filtering that effectively enhance the mode-shape visualization for bulk and surface acoustic wave devices. Although this method cannot directly measure absolute displacement, the simple measurement system and high speed measurement more than offset this disadvantage. The experimental results for fundamental thickness-shear and nearby inharmonic modes in a bimesa-shaped rectangular AT-cut quartz resonator have been presented. The results of the experiments and the analyses obtained by the three-dimensional finite element analyses correlate well and show the advantages and validity of the proposed technique.
Starting Page	491
Ending Page	495
Page Count	5
File Size	421704
File Format	PDF
ISSN	08853010
Volume Number	51
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-05-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Shape measurement Piezoelectric devices Acoustic measurements Velocity measurement Visualization Laser modes Motion measurement Surface acoustic wave devices Surface emitting lasers Displacement measurement
Content Type	Text
Resource Type	Article
Subject	Acoustics and Ultrasonics Instrumentation Electrical and Electronic Engineering

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