NDLI: Ion mean charge state in a biased vacuum arc plasma duct

Content Provider	IEEE Xplore Digital Library
Author	Kwok, D.T.-K. Chu, P.K. Bilek, M.M.M. Brown, I.G. Vizir, A.
Copyright Year	1973
Abstract	Vacuum arc or cathodic arc metal plasma sources are attractive and convenient for depositing high-quality thin metal films and metallurgical coatings. It is a common practice to use a curved magnetic filter duct to eliminate macroparticle contamination and to bias the duct wall with a positive voltage to enhance the throughput of the metal plasma. The metal plasma usually consists of several charge states and time-of-flight (TOF) experiments show that the mean charge state of the metal ions decreases with increasing bias and magnetic field applied to the filter duct. We also derive the throughput of ions with different charge states at different bias voltage and magnetic field by the particle-in-cell (PIC) method. The ion trajectory is simulated neglecting the influence of electron charge. Our results show that the simulated mean charge state displays a similar decreasing trend as the bias voltage and magnetic field strength are increased. Phenomena such as reduction of the mean charge state at high magnetic field strength and bias can be explained in terms of standalone multiply charged metal ions under the influences of magnetic and electric forces inside the filter duct.
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	2194
Ending Page	2201
Page Count	8
File Size	161367
File Format	PDF
ISSN	00933813
Volume Number	28
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Vacuum arcs Ducts Plasma sources Magnetic separation Magnetic fields Voltage Throughput Filters Magnetic films Coatings
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

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