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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Imamura, T. Hasuo, S. |
| Copyright Year | 2002 |
| Abstract | The surface of thin Al layers deposited on Nb films with different sputtering parameters was studied. The anodization profile and X-ray photoelectron spectroscopy (XPS) confirmed that the underlying Nb layer is wet by a thin 2.9-nm Al layer, and the oxide formation on the Nb layer is completely suppressed. The excellent surface coverage is due to the affinity of Al for Nb and is quite different from the degraded coverage of Al on Si. It was observed that the surface coverage of Al on Nb depends on the film characteristics of the underlying Nb layers. Nb/AlO/sub x/-Al/Nb junctions with lower Nb layers deposited with different sputtering parameters were fabricated. The authors verified that the quality of the junction is closely related to the surface coverage as analyzed by the anodization profiles and XPS.< |
| Sponsorship | Council on Superconductivity Appl. Superconductivity Conference Inc MIT |
| Starting Page | 84 |
| Ending Page | 94 |
| Page Count | 11 |
| File Size | 1444885 |
| File Format | |
| ISSN | 10518223 |
| Volume Number | 2 |
| Issue Number | 2 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1992-06-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Niobium Fabrication Josephson junctions Artificial intelligence Voltage Substrates Cathodes Insulation Semiconductor films Argon |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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