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  1. Circuits and Devices Magazine
  2. Year : 1992 Volume : 8
  3. Issue 6
  4. High-level CAD melds micromachined devices with foundries
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Year : 2006 Volume : 22
Year : 2005 Volume : 21
Year : 2004 Volume : 20
Year : 2003 Volume : 19
Year : 2002 Volume : 18
Year : 2001 Volume : 17
Year : 2000 Volume : 16
Year : 1999 Volume : 15
Year : 1998 Volume : 14
Year : 1997 Volume : 13
Year : 1996 Volume : 12
Year : 1995 Volume : 11
Year : 1994 Volume : 10
Year : 1993 Volume : 9
Year : 1992 Volume : 8
Issue 6
High-level CAD melds micromachined devices with foundries
Deep-submicron CMOS warms up to high-speed logic
Flip-chip bonding optimizes opto-ICs
Advanced bipolar circuits
Integrated optical interconnections
Designer's Casebook-current-mode minimax circuit
Issue 5
Issue 4
Issue 3
Issue 2
Issue 1
Year : 1991 Volume : 7
Year : 1990 Volume : 6
Year : 1989 Volume : 5
Year : 1988 Volume : 4
Year : 1987 Volume : 3
Year : 1986 Volume : 2
Year : 1985 Volume : 1

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High-level CAD melds micromachined devices with foundries

Content Provider IEEE Xplore Digital Library
Author Marshall, J.C. Parameswaran, M. Zaghloul, M.E. Gaitan, M.
Copyright Year 1988
Abstract The use of the Magic technology file to build transducer devices in the form of micro-heaters for use as IR pixels in a thermal display is described. Magic is a high-level computer-aided design (CAD) software system. The design methodology incorporated into the current MOSIS SCMOS technology file for Magic to implement the fabrication of silicon micromachined device structures is presented. This technology file uses only the layers supplied by a commercial standard CMOS process. The main advantages of this technique is that no major equipment is needed and the post-processing is reduced to a single, maskless etch step. The main disadvantage is that custom layers can not be incorporated into the design; therefore, the sensors/transducers can only be composed of polysilicon and/or aluminum sandwiched with thermal oxide and CVD oxide.<>
Starting Page 10
Ending Page 17
Page Count 8
File Size 796462
File Format PDF
ISSN 87553996
Volume Number 8
Issue Number 6
Language English
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date 1992-11-01
Publisher Place U.S.A.
Access Restriction Subscribed
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword Foundries Design automation Transducers CMOS technology Computer displays Software systems Design methodology Fabrication Silicon CMOS process
Content Type Text
Resource Type Article
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