NDLI: Stabilized Stroboscopic Full-Field Interferometer for Characterization of Subnanometer Surface Vibrations

Content Provider	IEEE Xplore Digital Library
Author	Lipiainen, L. Kokkonen, K. Kaivola, M.
Copyright Year	1992
Abstract	The ongoing rapid development of digital camera technology together with increasing computing power enabling fast image analysis has opened up possibilities to further advance the performance of full-field interferometry. We present a software-based stabilization method for stroboscopic homodyne full-field interferometry that enables phase sensitive absolute-amplitude measurements of surface vibrations in microelectromechanical devices. The reference signal for the stabilization is obtained from a freely selectable region in the acquired interference images, resulting in a compact interferometer design without the need for additional optical components for monitoring the operation point. The proposed stabilization method is implemented in an LED-based stroboscopic Michelson-type full-field interferometer. To demonstrate the performance of the setup, an out-of-plane vibration field at 12 MHz in a square-plate silicon resonator is characterized. The data analysis reveals that a minimum detectable amplitude of less than 30 pm is achieved in the measurement. These first results already demonstrate the potential of the software-stabilization concept and serve to advance the detection of low-amplitude surface vibrations with full-field interferometry.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1642
Ending Page	1646
Page Count	5
File Size	1350136
File Format	PDF
ISSN	10577157
Volume Number	24
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Vibrations Optical interferometry Optical surface waves Optical resonators Vibration measurement Cameras Optical imaging homodyne detection. surface vibrations interferometry full-field microelectromechanical devices acoustic devices homodyne detection
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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