NDLI: Optimum Design of a Dual-Range Force Sensor for Achieving High Sensitivity, Broad Bandwidth, and Large Measurement Range

Content Provider	IEEE Xplore Digital Library
Author	Jun Jiang Weihai Chen Jingmeng Liu Wenjie Chen Jianbin Zhang
Copyright Year	2001
Abstract	Force control is very crucial in nanoimprint lithography (NIL). It is necessary to develop a high-performance force sensor to provide real-time force feedback for the control process. Due to the unique procedure of NIL, the developed force sensor should include a high sensitivity, broad bandwidth, and large measurable range. However, these characteristics are normally conflicting in nature and cannot be physically avoided by any force transducers so far. To address this problem, this paper presents a novel dual-range force sensor, and uses a heuristic multiobjective optimization method to make a tradeoff among these characteristics. This method is based on the particle swarm optimization algorithm, meanwhile employs the Pareto ranking scheme to find optimal solutions. Through proper optimization, not only the three characteristics are compromised, the lowest stress concentration of the sensor body is maintained as well. To demonstrate the effectiveness of the optimization, numerical simulations with finite-element software COMSOL are conducted. A prototype sensor is then fabricated according to the optimization results. The simulation and prototype test results indicate that the optimized sensor has a resolution down to 800 $\mu $ N, a bandwidth up to 150 Hz, and a measurable range up to 180 N. All the results prove that the developed force sensor possesses a good property for high-performance force measurement, and satisfies the needs of NIL as well.
Sponsorship	IEEE Sensors Council
Starting Page	1114
Ending Page	1123
Page Count	10
File Size	2926123
File Format	PDF
ISSN	1530437X
Volume Number	15
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Force sensors Optimization Sensitivity Force measurement Force Bandwidth structural optimization Force sensor compliant mechanism nanoimprint
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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