NDLI: Robust MEMS Gyroscope Based on Thermal Principles

Content Provider	IEEE Xplore Digital Library
Author	Bahari, J. Rui Feng Leung, A.M.
Copyright Year	1992
Abstract	Two variants of a novel single-axis thermal gyroscope without seismic mass are designed, fabricated, and characterized in this paper. The operating principle of the device is differential temperature detection due to the Coriolis effect on an oscillatory gas stream created by alternating two resistive microheaters. The fabrication process is based on a bulk micromachining technology on a silicon substrate using platinum as the only conductor layer. The device structure consists of two resistive temperature detectors equally spaced from the two microheaters. The 170-nm-thick platinum heater and detector microstructures are freely suspended over a cavity etched into the substrate, with minimal structural support. A computer-controlled precision rotary stage is constructed to accurately measure the device performance. The devices demonstrate excellent linearity within the tested ±3.5 revolution per second angular rate of rotation and show sensitivities of 0.947 and 1.287 mV/ ^°/s at 20 mW heater powers. The robustness of the devices has been validated by the drop shocks of 2,722 to 16,398g (9.81 m/s²).
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	100
Ending Page	116
Page Count	17
File Size	28484935
File Format	PDF
ISSN	10577157
Volume Number	23
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature measurement Acceleration Gyroscopes Heating Detectors Force Micromechanical devices MEMS Angular rate of rotation gyroscope inertial sensor
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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