NDLI: Near-Contact Gas Damping and Dynamic Response of High-g MEMS Accelerometer Beams

Content Provider	IEEE Xplore Digital Library
Author	Parkos, D. Raghunathan, N. Venkattraman, A. Sanborn, B. Weinong Chen Peroulis, D. Alexeenko, A.
Copyright Year	1992
Abstract	This paper introduces and experimentally validates a new model for near-contact gas damping of microbeams. The model is formulated based on numerical simulations of rarefied gas dynamics using the Boltzmann Ellipsoidal Statistical Bhatnagar-Gross-Krook (ES-BGK) equation. The result is compared with existing models by simulating the motion of beams under high-g acceleration. To experimentally validate the damping models, single crystal silicon MEMS g-switches with cantilever microbeams of various lengths were utilized. The experimental measurements of beam dynamics under peak accelerations of approximately 50,000 g and acceleration ramp rates from 600 to 3,000 g/μs are compared with simulations. Additionally, the damping coefficients are extracted from existing vibrational mode data, and the resulting values are compared to the various models. The new near-contact model was found to predict contact and release times within a root-mean-square deviation from experiment below 9 and 7 for contact and release events, respectively. The damping values for the vibrational modes away from contact were predicted within 33% error, showing a more consistent predictive capability than provided by earlier models.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1089
Ending Page	1099
Page Count	11
File Size	14581313
File Format	PDF
ISSN	10577157
Volume Number	22
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Damping Mathematical model Aerodynamics Micromechanical devices Acceleration Equations Numerical models beams Gas damping acceleration measurement modeling
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Near-contact damping model and dynamic response of μ-beams under high-g loads

Real-time in situ electronic monitoring of dynamic contact behavior of MEMS high-g switches

Mathematical model of piezoelectric MEMS accelerometer

Nonlinear Regression Model of aLow-$g$ MEMS Accelerometer

Dynamic response of a plastic encapsulated high-g MEMS accelerometer

Time-based micro-g accelerometer with improved damper geometry

Design of MEMS based capacitive accelerometer

No Physical Stimulus Testing and Calibration for MEMS Accelerometer

Sub-1G MEMS accelerometer

Near-Contact Gas Damping and Dynamic Response of High-g MEMS Accelerometer Beams

Similar Documents

Near-contact damping model and dynamic response of μ-beams under high-g loads

Real-time in situ electronic monitoring of dynamic contact behavior of MEMS high-g switches

Mathematical model of piezoelectric MEMS accelerometer

Nonlinear Regression Model of aLow-$g$ MEMS Accelerometer

Dynamic response of a plastic encapsulated high-g MEMS accelerometer

Time-based micro-g accelerometer with improved damper geometry

Design of MEMS based capacitive accelerometer

No Physical Stimulus Testing and Calibration for MEMS Accelerometer

Sub-1G MEMS accelerometer

Near-Contact Gas Damping and Dynamic Response of High-g MEMS Accelerometer Beams