NDLI: Radio-Controlled Microactuator Based on Shape-Memory-Alloy Spiral-Coil Inductor

Content Provider	IEEE Xplore Digital Library
Author	Mohamed Ali, M.S. Bycraft, B. Bsoul, A. Takahata, K.
Copyright Year	1992
Abstract	This paper reports a bulk-micromachined shape-memory-alloy (SMA) actuator in the form of a spiral coil that constitutes an inductor-capacitor resonant circuit. The out-of-plane actuation of the SMA spiral-coil inductor is wirelessly controlled using external radio frequency (RF) magnetic fields. The resonant circuit is used as a frequency-selective wireless heater in which the SMA inductor produces heat to activate its own actuation when resonated with the RF magnetic field. The direct integration of bulk-micromachined nitinol SMA with a threshold temperature of 65 ^°C into a planar microfabrication process is enabled to build the 3-D spiral-coil SMA actuator in a self-assembled manner using a SiO₂ reset layer patterned on the SMA coil. The fabricated SMA structure yields an out-of-plane displacement of 466 μm in the cold state. The full actuation to the flat state is reached at 70°C upon tuning the field frequency to ~ 230 MHz with an RF output power of 0.7 W. The developed actuator is demonstrated to provide a maximum force of 30 mN. The temporal response of the actuator is revealed to be two to three times faster than that of previously reported wireless SMA actuators with separate heat sources.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	331
Ending Page	338
Page Count	8
File Size	1671636
File Format	PDF
ISSN	10577157
Volume Number	22
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Coils Actuators Temperature measurement Wireless communication Heating Radio frequency Wireless sensor networks shape memory alloys (SMAs) Microactuators micromachining radio control
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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