NDLI: Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice

Content Provider	IEEE Xplore Digital Library
Author	Nan Wang Tsai, J.M.-L. Fu-Li Hsiao Bo Woon Soon Dim-Lee Kwong Palaniapan, M. Chengkuo Lee
Copyright Year	1992
Abstract	Phononic crystal (PnC) resonators of Bloch-mode resonance made by replacing periodically arranged two or three rows of air holes with one row of air holes on a two-dimensional (2-D) silicon slab with air holes of square lattice have been investigated. Piezoelectric aluminum nitride (AlN) film is employed as the interdigital transducers to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS compatible. We also fabricate a PnC structure which has a stopband of 140 MHz <; f <; 195 MHz which agrees well with the simulation results. From our experimental results, we found that the two kinds of microfabricated PnC resonators have different optimization conditions in terms of resonant frequency and Q factor, as well as insertion loss, despite their similar design approach. As compared to PnC resonators of hexagonal lattice, the proposed Bloch-mode PnC resonators of square lattice demonstrated higher resonant frequency, higher Q factor, and a smaller device area. The promising acoustic characteristics may be further optimized for applications such as microfluidics, biomedical devices, and radio-frequency communications in the gigahertz range.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	801
Ending Page	810
Page Count	10
File Size	1079567
File Format	PDF
ISSN	10577157
Volume Number	21
Issue Number	4
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Resonant frequency Photonic band gap Slabs Acoustics Q factor Cavity resonators resonator CMOS compatible microelectromechanical systems (MEMS) phononic crystal (PnC)
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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