NDLI: Lamellar-Grating-Based MEMS Fourier Transform Spectrometer

Content Provider	IEEE Xplore Digital Library
Author	Seren, H.R. Holmstrom, S. Ayerden, N.P. Sharma, J. Urey, H.
Copyright Year	1992
Abstract	Design, fabrication, and characterization of a high-performance micromachined lamellar-grating-interferometer-based Fourier transform spectrometer are presented. The device is designed to give high deflections with very low dynamic deformation and good mode separation. Mechanical self-stoppers are introduced to withstand accelerations larger than 500 g due to shock. The clear aperture area of the grating is about 10 mm². The maximum deflection while electrostatically actuated at ambient conditions is ±356 μm at 71.2 V and 340 Hz, setting a record for comparable devices. At a pressure of 8.6 Pa, the same deflection is reached at 4.3 V. Six hundred eighty spectra per second can be recorded with a resolution of 14 cm^-1. With a HeNe laser at 633 nm, a spectral resolution of 0.54 nm (22 cm^-1) is reached using electrostatic actuation. The microelectromechanical systems device is integrated into a compact Fourier transform spectrometer setup including a blackbody source, an infrared (IR) detector, and a visible laser using the device back side for reference. Early results with IR interferograms are also reported. In addition, the devices are actuated with pressure waves in the ambient air to reach deflections up to ±700 μm. With this setup, the spectrum of a red laser is measured with a resolution of 0.3 nm (12.4 cm^-1).
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	331
Ending Page	339
Page Count	9
File Size	1200901
File Format	PDF
ISSN	10577157
Volume Number	21
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-04-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gratings Finite element methods Resonant frequency Springs Micromechanical devices Fabrication Optical interferometry microoptoelectromechanical systems Fourier transform spectroscopy (FTS) infrared (IR) spectroscopy interferometer lamellar grating
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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