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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ming Jun Ren Chi Fai Cheung Ling Bao Kong Xiangqian Jiang |
| Copyright Year | 1963 |
| Abstract | Ultraprecision freeform surfaces (UPFSs) are increasingly being used in advanced optical systems due to their superior optical properties. However, current research on the measurement of machined UPFSs is still hindered by lack of efficient and robust form characterization techniques which can characterize the form error of measured freeform surfaces with submicrometer accuracy. This paper presents an invariant-feature-pattern-based form characterization (IFPFC) method. IFPFC makes use of intrinsic surface features (e.g., Gaussian curvature) to map the surface into an orientation-independent feature pattern to represent the surface geometry. Surface matching and comparison are then undertaken in terms of feature pattern registration. Compared with conventional methods, the IFPFC is not only robust to the initial position of the measured surface relative to the design template but also computationally efficient since it does not involve much iteration. A series of computer simulations and actual measurement are conducted to demonstrate the performance and the validity of the IFPFC method in the measurement and characterization of UPFSs with submicrometer form accuracy. |
| Sponsorship | IEEE Instrumentation and Measurement Society Bureau international des poids et mesures IEEE International Bureau of Weights and Measures (BIPM) URSI NBS Agency Ind. Sci. & Technol., Min. Int. Trade & Ind. Sci. Council Japan International Union of Pure and Applied Physics (IUPAP) NIST NRCC National Conference of Standards Laboratories (NCSL) Allen Osborne Associates Andeen-Hagerling, Inc. Ballantine Lab. Inc. Clarke-Hess Communications Research Corp. Fluke Corporation Guildline Instruments Hewlett-Packard Co. Julie Res. Lab. Inc. Keithley Instruments, Inc. Measurements International Ltd. Canada QuadTech Inc. Quantum Design Inc. Rotek Instrum. Corp. Tegam Inc. Tektronix Inc |
| Starting Page | 963 |
| Ending Page | 973 |
| Page Count | 11 |
| File Size | 661463 |
| File Format | |
| ISSN | 00189456 |
| Volume Number | 61 |
| Issue Number | 4 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2012-04-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Surface roughness Rough surfaces Accuracy Surface treatment Surface reconstruction Vectors Image registration surface intrinsic feature Form characterization freeform surfaces precision surface measurement |
| Content Type | Text |
| Resource Type | Article |
| Subject | Instrumentation Electrical and Electronic Engineering |
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