NDLI: Active MEMS Valves for Flow Control in a High-Pressure Micro-Gas-Analyzer

Content Provider	IEEE Xplore Digital Library
Author	Galambos, P. Lantz, J. Baker, M.S. McClain, J. Bogart, G.R. Simonson, R.J.
Copyright Year	1992
Abstract	We present active electrostatic MEMS gas valves for Micro-Gas-Analyzer (MGA) flow control. These unique valves enable extremely low dead volume, highly integrated flow control chips for the MGA application, and potentially others (e.g., propulsion, pneumatic, and thermodynamic microsystems). We have demonstrated low leak rates ( <; 0.025 sccm, <; 0.0025 sccm on a similar passive valve design), high operating pressures 6.9×10⁵ N/m² (100 psig), a high-pressure record for valves of this size and type, and high flow rates (>; 25 sccm) using control voltages on the order of 100 V. The valve designs presented eliminate charge build-up issues associated with insulating materials and are closely tied to a base-lined microfabrication process (SUMMiT), allowing mass production. Using this process, which incorporates only CMOS compatible materials, eliminates outgassing and absorption problems inherent to microvalve designs that incorporate elastomers or organic bonding layers, and reduces contamination when the valve is part of the chemical analysis flowpath. The results obtained indicate that even higher performance level valves (>; 1.4 × 10⁶ N/m² or 200 psig operating pressure, at similar control voltage, flow rates, and leak rates) are possible.
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1150
Ending Page	1162
Page Count	13
File Size	1148127
File Format	PDF
ISSN	10577157
Volume Number	20
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Valves Force Electrodes Springs Electrostatics Actuators Glass valves Chemical analysis electrostatic devices fluid flow control
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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