NDLI: A Monolithic Piezoresistive Pressure-Flow Sensor With Integrated Signal-Conditioning Circuit

Content Provider	IEEE Xplore Digital Library
Author	Dan Li Ting Li Dacheng Zhang
Copyright Year	2001
Abstract	A monolithic integrated pressure-flow sensor with on-chip signal-conditioning CMOS circuit has been developed for simultaneous measurements of pressure and flow rates, which is used in automatic control system. Both the pressure sensing and flow sensing are based on the piezoresistive effect, and only one additional mask is applied on the integrated pressure sensor to realize the pressure-flow sensor. A fully integrated pressure-flow sensor, which is based on inter-COMS process, is fabricated and packaged. A commercial computational fluid dynamics (CFD) software package, Fluent 6.1, is used to model the flow inside this pressure-flow sensor. The performance of the sensor is then predicted utilizing Coventorware based on the result from CFD simulation. For the testing, pressure sensor was first calibrated at the range of 0-50 KPa, and it showed a pressure sensitivity of 1.3 mV/mmHg. Afterwards, the simultaneous measurement of pressure and flow rate is implemented at air flow rates of 0-5 L/min. Both the pressure output and flow output have a quadratic relation with the input flow rate of the fluid, which is consistent with the simulation results. Based on the pressure calibration, the dependence of pressure to flow rate is finally obtained.
Sponsorship	IEEE Sensors Council
Starting Page	2122
Ending Page	2128
Page Count	7
File Size	1424347
File Format	PDF
ISSN	1530437X
Volume Number	11
Issue Number	9
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Sensors Fabrication Piezoresistive devices Computational fluid dynamics Fluid flow measurement Silicon simultaneous measurement Integrated signal-conditioning circuit pressure-flow sensor
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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