NDLI: A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process

Content Provider	IEEE Xplore Digital Library
Author	Logan, A.S. Wong, L.L.P. Yeow, J.T.W.
Copyright Year	1996
Abstract	Capacitive micromachined ultrasonic transducers (CMUTs) are an alternative to the conventional method of generating ultrasound that increases bandwidths, simplifies fabrication, and facilitates the integration with necessary electronics. We report the fabrication, characterization, and initial-phased array imaging results of a 64-element array CMUT fabricated using a fusion bonding process where both the membrane and insulation layers are user deposited silicon nitride. Individual cells have a diameter of 25 μm and a membrane thickness of 500 nm. The center frequency in immersion is 6.6 MHz with a -6 dB fractional bandwidth of 123%. A 90° phased array sector scan is made of a four-wire target using a 32-element subset of the array. Pressures in excess of 2 MPa are measured. An axial resolution of 130 μm and a lateral resolution of 0.03 rad are obtained from a wire target 15 mm away from the transducer.
Starting Page	861
Ending Page	865
Page Count	5
File Size	501704
File Format	PDF
ISSN	10834435
Volume Number	16
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Phased arrays Biomedical imaging Micromachining Ultrasonic transducer arrays Silicon ultrasound Capacitive micromachined ultrasonic transducer (CMUT) imaging phased array
Content Type	Text
Resource Type	Article
Subject	Control and Systems Engineering Electrical and Electronic Engineering Computer Science Applications

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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