NDLI: Millimeter-Wave Passives in 45-nm Digital CMOS

Content Provider	IEEE Xplore Digital Library
Author	Jinglin Shi Kai Kang Yong Zhong Xiong Brinkhoff, J. Fujiang Lin Xiao-Jun Yuan
Copyright Year	1980
Abstract	With dramatically increased f_t and f_max, CMOS technologies have been widely applied in the design of millimeterwave circuits. To reduce the fabrication cost, digital CMOS processes may be used. Due to the lack of thick top metal and the reduced distance between the top metal and silicon substrates in a digital CMOS, the design of high-performance passives becomes very challenging, particularly in the millimeter-wave frequency regime. In this letter, passives with novel structures were fabricated in a 45-nm digital CMOS process. These passives, including transmission lines, spiral inductors, and metal-oxide-metal (MOM) capacitors, were designed and characterized up to 110 GHz. Their performance was compared with those fabricated using 180- and 90-nm RF CMOS processes. These passives achieved good performance in the millimeter-wave regime. A MOM capacitor has a self-resonant frequency higher than 110 GHz. An inductor achieves a quality factor of 24 at 70 GHz. These results show the feasibility of implementing the millimeterwave passives and systems in a 45-nm digital CMOS process.
Sponsorship	IEEE Electron Devices Society
Starting Page	1080
Ending Page	1082
Page Count	3
File Size	260599
File Format	PDF
ISSN	07413106
Volume Number	31
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-10-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Metals CMOS process Capacitors CMOS integrated circuits Inductors Millimeter wave circuits transmission line CMOS CMOS processes CPWG metal-oxide-metal (MOM) capacitor microstrip millimeter wave on-wafer measurement slow-wave CPW (SCPW) spiral inductor
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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