NDLI: Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results

Content Provider	IEEE Xplore Digital Library
Author	Hogan, T.J. Taylor, S. Cheung, K. Velasquez-Garcia, L.F. Akinwande, A.I. Pedder, R.E.
Copyright Year	1963
Abstract	Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF) is one component of a QMS and is suitable for microfabrication. MEMS manufacturing techniques are more suitable to the production of rectilinear electrodes, instead of the more widely used circular electrodes. Present understanding of the performance characteristics of rectilinear electrodes and the dependence of these characteristics on electrode geometry are not well documented. In this paper, we report on the performance characteristics of a square-electrode QMF. Both the predicted performances obtained by computer simulation and experimental data are presented for operation in stability zone 1 (0.236, 0.706) and zone 3 (3.16, 3.23). A comparison between these results and the simulated data for equivalent devices constructed using hyperbolic and circular electrodes for operation in zone 1 is also made. This comparison demonstrates that, although the field produced by square electrodes is far from the “ideal,” it is still possible to achieve useful filtering action. Our results also show that, for operation in zone 3, performance comparable with that of hyperbolic and circular electrodes operating in zone 1 is achievable.
Sponsorship	IEEE Instrumentation and Measurement Society Bureau international des poids et mesures IEEE International Bureau of Weights and Measures (BIPM) URSI NBS Agency Ind. Sci. & Technol., Min. Int. Trade & Ind. Sci. Council Japan International Union of Pure and Applied Physics (IUPAP) NIST NRCC National Conference of Standards Laboratories (NCSL) Allen Osborne Associates Andeen-Hagerling, Inc. Ballantine Lab. Inc. Clarke-Hess Communications Research Corp. Fluke Corporation Guildline Instruments Hewlett-Packard Co. Julie Res. Lab. Inc. Keithley Instruments, Inc. Measurements International Ltd. Canada QuadTech Inc. Quantum Design Inc. Rotek Instrum. Corp. Tegam Inc. Tektronix Inc
Starting Page	2458
Ending Page	2467
Page Count	10
File Size	1062954
File Format	PDF
ISSN	00189456
Volume Number	59
Issue Number	9
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Filters Electrodes Mass spectroscopy Space exploration Monitoring Microelectromechanical systems Space technology Manufacturing Production zone 3 Microelectromechanical multipoles quadrupole mass filter square electrode
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electrical and Electronic Engineering

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