NDLI: Fabrication and Characterization of GaAs MOS Capacitor With CVD Grown Polymer-Based Thin Film as a Gate Dielectric

Content Provider	IEEE Xplore Digital Library
Author	Oulachgar, E.H. Aktik, C. Scarlete, M.
Copyright Year	1963
Abstract	GaAs Metal-Oxide-Semiconductor (MOS) capacitor using a polymer-based thin film as a gate dielectric has been fabricated and electrically characterized. The influence of the atomic concentration of oxygen in the dielectric films on the capacitance-voltage (C-V) and current-voltage characteristics of the MOS capacitors has been thoroughly investigated. The GaAs MOS capacitor obtained at low concentration of oxygen showed an almost ideal MOS capacitor behavior. The density of the interface traps extracted from the conductance-frequency measurement was found to be as low as 9.7 x 10⁹ eV^-1 cm^-2. In addition, the MOS capacitor exhibits very low leakage current (6.6 10^-9 A/cm² at -1 V) and relatively high breakdown voltage (2.05 MV/cm). These characteristics make polymer-based thin films very attractive as a passivation layer and a gate dielectric for GaAs MOSFET. The ability to tune the polymer through chemical synthesis and polymer functionalization makes CVD grown polymer-based thin films very promising for the passivation of virtually any semiconductor surface.
Sponsorship	IEEE Electron Devices Society
Starting Page	1942
Ending Page	1947
Page Count	6
File Size	448111
File Format	PDF
ISSN	00189383
Volume Number	57
Issue Number	8
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-08-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Gallium arsenide Dielectrics Polymers MOS capacitors Logic gates Atomic measurements Capacitance SiCON Breakdown voltage $C$ –$V$ characterization GaAs MOSFET GaAs passivation gate dielectric interface traps leakage current metal-oxide-semiconductor (MOS) capacitor polymer-based CVD polymer thin films
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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