NDLI: Electrical Instability of RF Sputter Amorphous In-Ga-Zn-O Thin-Film Transistors

Content Provider	IEEE Xplore Digital Library
Author	Tze-Ching Fung Abe, K. Kumomi, H. Kanicki, J.
Copyright Year	2005
Abstract	Bias-temperature-stress (BTS) induced electrical instability of the RF sputter amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) was investigated. Both positive and negative BTS were applied and found to primarily cause a positive and negative voltage shift in transfer (I _DS-V _GS) characteristics, respectively. The time evolution of bulk-state density (N _BS) and characteristic temperature of the conduction-band-tail-states (TG) are extracted. Since both values showed only minor changes after BTS, the results imply that observed shift in TFT I _DS-V _GS curves were primarily due to channel charge injection/trapping rather than defect states creation. We also demonstrated the validity of using stretch-exponential equation to model both positive and negative BTS induced threshold voltage shift (DeltaV _th) of the a-IGZO TFTs. Stress voltage and temperature dependence of DeltaV _th evolution are described.
Sponsorship	IEEE Lasers and Electro-Optics Society Optical Society of America
Starting Page	452
Ending Page	461
Page Count	10
File Size	810596
File Format	PDF
ISSN	1551319X
Volume Number	5
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-12-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radio frequency Amorphous materials Thin film transistors Stress Temperature Flat panel displays Active matrix technology Threshold voltage Crystallization Annealing transparent thin-film transistors (TFTs) a-IGZO amorphous semiconductors bias temperature stress (BTS) semiconductor device reliability
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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