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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Amat, E. Kauerauf, T. Degraeve, R. Rodriguez, R. Nafria, M. Aymerich, X. Groeseneken, G. |
| Copyright Year | 2001 |
| Abstract | The temperature dependence of channel hot-carrier (CHC) degradation in n-MOS transistors with high-k dielectrics has been studied. The analysis starts from the most damaging CHC stress conditions at room temperature (V G = V D/2 for long channels and V G = V D for short channels). We find that, for long-channel transistors, the CHC degradation decreases at high temperature, while for short-channel transistors, an increase is observed. In this paper, a new picture to explain the observed increment of CHC damage with temperature for short-channel transistors with high-k dielectric is presented. We demonstrate that the total CHC degradation consists of two components: the classical CHC damage located at the drain side and the degradation produced by the voltage drop over the gate dielectric, which can be considered a positive bias temperature instability (PBTI) effect. Particularly for short transistors stressed at high temperatures, this PBTI component dominates the total CHC degradation. |
| Sponsorship | IEEE Electron Devices Society IEEE Reliability Society |
| Starting Page | 454 |
| Ending Page | 458 |
| Page Count | 5 |
| File Size | 269169 |
| File Format | |
| ISSN | 15304388 |
| Volume Number | 9 |
| Issue Number | 3 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-09-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Degradation Hot carriers Stress MOSFETs Temperature dependence High-K gate dielectrics Voltage Chemicals Dielectric breakdown reliability Charge pumping (CP) high-$k$ dielectrics high temperature hot carriers |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Safety, Risk, Reliability and Quality Electrical and Electronic Engineering |
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