NDLI: Athermalizing and Trimming of Slotted Silicon Microring Resonators With UV-Sensitive PMMA Upper-Cladding

Content Provider	IEEE Xplore Digital Library
Author	Linjie Zhou Okamoto, K. Yoo, S.J.B.
Copyright Year	1989
Abstract	This letter experimentally demonstrates significant reduction in the resonance thermal sensitivity of the slotted silicon microring resonators by exploiting polymethyl methacrylate (PMMA) as upper-cladding. We investigate the resonance temperature dependence on the slot width with and without PMMA upper-cladding. The experimental results show that the temperature dependence is reduced from 91 pm/degC for a regular microring resonator to 27 pm/degC for the PMMA-clad slotted microring resonator. The ultraviolet (UV) sensitive PMMA upper-cladding also allows the resonance wavelengths of slotted microring resonators shift by 0.5 nm under UV light trimming. With the demonstrated schemes, each individual optical component can be athermalized and precisely registered to standard wavelengths for a future multiwavelength optically interconnected computing system-on-a-chip.
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	1175
Ending Page	1177
Page Count	3
File Size	690178
File Format	PDF
ISSN	10411135
Volume Number	21
Issue Number	17
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-09-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Silicon Optical resonators Resonance Optical waveguides Optical computing Optical interconnections Power system interconnection Temperature dependence Optical devices System-on-a-chip wavelength-division multiplexing Integrated photonic devices microring resonators silicon photonics slotted waveguides
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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