NDLI: Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls

Content Provider	IEEE Xplore Digital Library
Author	Po-Jui Chen Rodger, D.C. Humayun, M.S. Yu-Chong Tai
Copyright Year	1992
Abstract	This paper presents the first parylene-based floating-disk microvalve with self-pressure-regulating characteristics for various microfluidic applications. By incorporating a free-floating disk diaphragm with no anchoring/tethering structures to constrain its movement, the microvalve realizes configurable pressure-based flow-shunting functions in a stand-alone fashion. Its passive operation eliminates the need for power sources or the external actuation of the device. A multilayer polymer surface-micromachining technology is utilized for device fabrication by exploiting parylene C (poly-chloro-p-xylylene) as the biocompatible structural material for high mechanical compliance as compared with other conventional thin-film materials. Experimental results successfully demonstrate that the in-channel microvalves control water flows in the following two different shunt designs: 1) a nearly ideal regular check valve with zero forward-cracking pressure, zero reverse leakage, and 1.25 times10¹³ - 2.09 times 10¹³ Nldrs/m⁵ (0.03-0.05 psildrmin/muL, 1.55-2.59 mmHgldrmin/muL) of fluidic resistance; and 2) a pressure-bandpass check valve with 0-100 mmHg and 0-10 muL/min of pressure and flow rate regulation ranges, respectively, as well as 4.88 ×10¹³ Nldrs/m⁵ (0.12 psi middotmin/muL, 6.08 mmHg middotmin/muL) of fluidic resistance in the forward conductive region. Such a biocompatible and implantable microvalve has the great potential of being integrated in microfluidic systems to facilitate effective microflow control for lab-on-a-chip and biomedical applications. [2008-0055].
Sponsorship	IEEE Electron Devices Society American Society of Mechanical Engineering (ASME)
Starting Page	1352
Ending Page	1361
Page Count	10
File Size	1207813
File Format	PDF
ISSN	10577157
Volume Number	17
Issue Number	6
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-12-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microvalves Microfluidics Biological materials Valves Immune system Nonhomogeneous media Fabrication Polymer films Thin film devices Pressure control valves Flow control fluidics mechanical engineering microelectromechanical devices micromachining
Content Type	Text
Resource Type	Article
Subject	Mechanical Engineering Electrical and Electronic Engineering

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